10 kPa

On-Chip Temperature

Compensated & Calibrated

Silicon Pressure Sensors

The MPXM2010 device is a silicon piezoresistive pressure sensors providing a highly

accurate and linear voltage output — directly proportional to the applied pressure. The

sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film

resistor network integrated on–chip. The chip is laser trimmed for precise span and offset

calibration and temperature compensation.

Features

• Temperature Compensated Over 0°C to +85°C

• Available in Easy–to–Use Tape & Reel

• Ratiometric to Supply Voltage

• Gauge Ported & Non Ported Options

Application Examples

• Respiratory Diagnostics

• Air Movement Control

• Controllers

• Pressure Switching

Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure

sensor chip.

Figure 1. Temperature Compensated Pressure Sensor Schematic

3

SENSING

ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

CALIBRATION

CIRCUITRY

2

4

1

GND

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the sensor is directly proportional to the differential

pressure applied.

The output voltage of the differential or gauge sensor increases with increasing

pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,

output voltage increases as increasing vacuum is applied to the vacuum side (P2)

relative to the pressure side (P1).

Preferred devices are Motorola recommended choices for future use and best overall value.

Order this document

by MPXM2010/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

MPXM2010

SERIES

0 to 10 kPa (0 to 1.45 psi)

25 mV FULL SCALE SPAN

(TYPICAL)

PIN NUMBER

1

2

Gnd

3

4

Motorola Preferred Device

MPXM2010D/DT1

CASE 1320

MPXM2010GS/GST1

CASE 1320A

SCALE 1:1

SCALE 1:1

MPAK PACKAGE

REV 1