100 kPa

On-Chip Temperature

Compensated & Calibrated

Silicon Pressure Sensors

The MPXM2102 device is a silicon piezoresistive pressure sensors providing a highly

accurate and linear voltage output — directly proportional to the applied pressure. The

sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film

resistor network integrated on–chip. The chip is laser trimmed for precise span and offset

calibration and temperature compensation.

Features

• Temperature Compensated Over 0°C to +85°C

• Unique Silicon Shear Stress Strain Gauge

• Easy to Use Tape & Reel

• Ratiometric to Supply Voltage

• Gauge Ported & Non Ported Options

Application Examples

• Pump/Motor Controllers

• Robotics

• Level Indicators

• Medical Diagnostics

• Pressure Switching

• Barometers

• Altimeters

Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure

sensor chip.

Figure 1. Temperature Compensated Pressure Sensor Schematic

3

X-ducer

SENSING

ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

CALIBRATION

CIRCUITRY

2

4

1

GND

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the X–ducer is directly proportional to the differential

pressure applied.

The output voltage of the differential or gauge sensor increases with increasing

pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,

output voltage increases as increasing vacuum is applied to the vacuum side (P2)

relative to the pressure side (P1).

Preferred devices are Motorola recommended choices for future use and best overall value.

X–ducer is a trademark of Motorola, Inc.

Order this document

by MPXM2102/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

MPXM2102

SERIES

0 to 100 kPa (0 to 14.5 psi)

40 mV FULL SCALE SPAN

(TYPICAL)

PIN NUMBER

1

2

Gnd

3

4

Motorola Preferred Device

CASE 1320A–02

MPAK, STYLE 1

CASE 1320A–02

MPAK, STYLE 2

SCALE 2:1

SCALE 2:1

REV 0